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Kinetics of the reactions involving CF2and CF in a pure tetrafluoromethane plasma: II. Production and loss of CF2and CF in the processes of fluorocarbon polymerization

✍ Scribed by V. V. Ivanov; K. S. Klopovskii; D. V. Lopaev; O. V. Proshina; A. T. Rakhimov; T. V. Rakhimova; G. B. Rulev

Book ID: 110129580
Publisher: SP MAIK Nauka/Interperiodica
Year: 2002
Tongue: English
Weight: 218 KB
Volume: 28
Category: Article
ISSN: 1063-780X
DOI: 10.1134/1.1458989

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