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Spatial Distribution and Surface Loss of CF 3 and CF 2 Radicals in a CF 4 Etching Plasma

✍ Scribed by Hikosaka, Yukinobu; Toyoda, Hirotaka; Sugai, Hideo


Book ID
125426714
Publisher
Institute of Pure and Applied Physics
Year
1993
Tongue
English
Weight
739 KB
Volume
32
Category
Article
ISSN
0021-4922

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