Kinetics of the reactions involving CF2and CF in a pure tetrafluoromethane plasma: I. Production of CF2and CF via electron-impact dissociation
β Scribed by V. V. Ivanov; K. S. Klopovskii; D. V. Lopaev; O. V. Proshina; A. T. Rakhimov; T. V. Rakhimova; G. B. Rulev
- Book ID
- 110129579
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2002
- Tongue
- English
- Weight
- 190 KB
- Volume
- 28
- Category
- Article
- ISSN
- 1063-780X
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