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Kinetics of the reactions involving CF2and CF in a pure tetrafluoromethane plasma: I. Production of CF2and CF via electron-impact dissociation

✍ Scribed by V. V. Ivanov; K. S. Klopovskii; D. V. Lopaev; O. V. Proshina; A. T. Rakhimov; T. V. Rakhimova; G. B. Rulev


Book ID
110129579
Publisher
SP MAIK Nauka/Interperiodica
Year
2002
Tongue
English
Weight
190 KB
Volume
28
Category
Article
ISSN
1063-780X

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