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Kinetics of chemical vapor deposition of SiC from methyltrichlorosilane and hydrogen

✍ Scribed by Cuiying Lu; Laifei Cheng; Chunnian Zhao; Litong Zhang; Yongdong Xu

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
320 KB
Volume
255
Category
Article
ISSN
0169-4332

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