CVD of SiC from Methyltrichlorosilane. Part I: Deposition Rates
✍ Scribed by W. G. Zhang; K. J. Hüttinger
- Publisher
- John Wiley and Sons
- Year
- 2001
- Tongue
- English
- Weight
- 512 KB
- Volume
- 7
- Category
- Article
- ISSN
- 0948-1907
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