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Kinetic factors in the chemical vapor deposition of carbon from methane

✍ Scribed by M.L. Lieberman

Publisher
Elsevier Science
Year
1975
Tongue
English
Weight
212 KB
Volume
13
Category
Article
ISSN
0008-6223

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πŸ“œ SIMILAR VOLUMES

25. Kinetic factors in the chemical vapo
25. Kinetic factors in the chemical vapor deposition of carbon from methane
✍ M.L Lieberman; G.T Noies πŸ“‚ Article πŸ“… 1973 πŸ› Elsevier Science 🌐 English βš– 128 KB

## ABSTRACTS that the shape and sharpness of the three-dimensional ( 101) and ( 112) reflection, respectively, are considerably developed with time, whereas the mean interlayer spacing as determined by the (004) line is not changed significantly for holding times longer than 15 min.

The chemical vapor deposition of carbon
The chemical vapor deposition of carbon on carbon fibers
✍ H.O. Pierson; M.L. Lieberman πŸ“‚ Article πŸ“… 1975 πŸ› Elsevier Science 🌐 English βš– 775 KB

The relations between chemical vapor deposition (CVD) parameters and the resultant pyrolytic carbon microstructures have been examined for matrix deposition in fibrous carbon substrates. The parameters considered are temperature (1200-145O"C), pressure (20-630 Torr), C/H ratio (l/4-1/14), total flow

Kinetics of deposition of pyrolytic carb
Kinetics of deposition of pyrolytic carbon films from methane and carbon suboxide
✍ T.J Hirt; H.B Palmer πŸ“‚ Article πŸ“… 1963 πŸ› Elsevier Science 🌐 English βš– 620 KB

Using an isothermal flow reactor of annular configuration, the rates of carbon deposition from CH4 and C,O, have been measured over the respective temperature ranges, 1168Β°-13720K and 900"-1025Β°K. Under the experimental conditions employed, deposition from both of these compounds is found to be cont