✦ LIBER ✦

25. Kinetic factors in the chemical vapor deposition of carbon from methane

✍ Scribed by M.L Lieberman; G.T Noies

Publisher: Elsevier Science
Year: 1973
Tongue: English
Weight: 128 KB
Volume: 11
Category: Article
ISSN: 0008-6223
DOI: 10.1016/0008-6223(73)90361-8

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✦ Synopsis

ABSTRACTS

that the shape and sharpness of the three-dimensional ( 101) and ( 112) reflection, respectively, are considerably developed with time, whereas the mean interlayer spacing as determined by the (004) line is not changed significantly for holding times longer than 15 min.

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