✦ LIBER ✦
On the primary process in plasma-chemical and photochemical vapor deposition from silane: An ab initio study of unimolecular decomposition of SiH4 in the lowest triplet state
✍ Scribed by Minoru Tsuda; Setsuko Oikawa; Kiyoshi Nagayama
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 304 KB
- Volume
- 118
- Category
- Article
- ISSN
- 0009-2614
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