The relations between chemical vapor deposition (CVD) parameters and the resultant pyrolytic carbon microstructures have been examined for matrix deposition in fibrous carbon substrates. The parameters considered are temperature (1200-145O"C), pressure (20-630 Torr), C/H ratio (l/4-1/14), total flow
98. The chemical vapor deposition of carbon on graphite surfaces
โ Scribed by D.F Cummings; R.J Diefendorf
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 251 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0008-6223
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