Surface Morphology Evolution of Chemical Vapor-Deposited Tungsten Films on Si(100)

✍ Scribed by Luis Vázquez; Roberto C. Salvarezza; Ezequiel Albano; Alejandro J. Arvia; Alberto Hernández Creus; Roland A. Levy; José M. Albella

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 256 KB
• Volume: 04
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/(sici)1521-3862(199805)04:03<89::aid-cvde89>3.0.co;2-9