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[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Fabrication of cylinder type micro channel using photoresist reflow and isotropic etching

✍ Scribed by Chang-Hyun Bae, ; Chang-Taeg Seo, ; Jong-Hyun Lee,

Book ID: 127164417
Publisher: Japan Soc. of Appl. Phys
Year: 2003
Tongue: Japanese
Weight: 139 KB
Category: Article
ISBN-13: 9784891140403
DOI: 10.1109/imnc.2003.1268707

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