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[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Nanoimprint mold repair by Ga/sup +/ focused-ion-beam

✍ Scribed by Watanabe, K.; Morita, T.; Kometani, R.; Kanda, K.; Haruyama, Y.; Kaito, T.; Matsui, S.

Book ID: 126716432
Publisher: Japan Soc. of Appl. Phys
Year: 2003
Weight: 129 KB
Category: Article
ISBN-13: 9784891140403
DOI: 10.1109/IMNC.2003.1268617

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