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[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Impact of mask enhancer on 65-nm node contacts

✍ Scribed by Misaka, A.; Matsuda, T.; Yuito, T.; Matsuo, T.; Koizumi, T.; Watanabe, H.; Sasago, M.

Book ID: 126722372
Publisher: Japan Soc. of Appl. Phys
Year: 2003
Weight: 118 KB
Category: Article
ISBN-13: 9784891140403
DOI: 10.1109/IMNC.2003.1268491

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