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[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Low temperature, atmospheric pressure plasma processing of materials

✍ Scribed by Hicks, R.F.; Xiawan Yang, ; Mooravej, M.; Nowling, G.; Babayan, S.

Book ID: 126735911
Publisher: Japan Soc. of Appl. Phys
Year: 2003
Weight: 59 KB
Category: Article
ISBN-13: 9784891140403
DOI: 10.1109/IMNC.2003.1268508

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