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[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Application of electron projection lithography to contacts in 65 nm node and beyond

✍ Scribed by Ikeda, J.; Yamada, A.; Shimizu, S.; Hirayanagi, N.; Suzuki, K.

Book ID: 126754799
Publisher: Japan Soc. of Appl. Phys
Year: 2003
Weight: 296 KB
Category: Article
ISBN-13: 9784891140403
DOI: 10.1109/IMNC.2003.1268494

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