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[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Use of plasma treatment in the sol-gel process of ferroelectric (Bi,La )/sub 4/Ti/sub 3/O/sub 12/ thin films for crystalline orientation control

✍ Scribed by Sugita, N.; Boku, S.; Tokumitsu, E.

Book ID: 126669274
Publisher: Japan Soc. of Appl. Phys
Year: 2003
Weight: 140 KB
Category: Article
ISBN-13: 9784891140403
DOI: 10.1109/IMNC.2003.1268511

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