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Isotopical ranges: 10,11B ion implantation in Si

โœ Scribed by P.C. Zalm; G.M. Fontijn; K.T.F. Janssen; C.J. Vriezema

Book ID
113279899
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
456 KB
Volume
42
Category
Article
ISSN
0168-583X

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