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Ion projection lithography in (in)organic resist layers

✍ Scribed by R. Fischer; E. Hammel; H. Löschner; G. Stengl; P. Wolf; H. Kraus; G. Stangl

Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
416 KB
Volume
5
Category
Article
ISSN
0167-9317

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