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Progress in ion projection lithography

✍ Scribed by A. Chalupka; J. Fegerl; R. Fischer; G. Lammer; H. Löschner; L. Malek; R. Nowak; G. Stengl; C. Traher; P. Wolf

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Progress in EB-cell projection lithograp

✍ N. Saitou; S. Moriyama; S. Okazaki; G. Matsuoka; F. Murai; Y. Sakitani; H. Yoda; 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 206 KB

Recent progress in ion beam lithography

✍ W.L. Brown 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 826 KB

Ion projection lithography in (in)organi

✍ R. Fischer; E. Hammel; H. Löschner; G. Stengl; P. Wolf; H. Kraus; G. Stangl 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 416 KB

Submicron lithography and DUV-master mas

✍ G. Stangl; F. Rüdenauer; W. Maurer; W. Fallmann 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 610 KB

4098. Projection ion lithography with ap

📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 181 KB

Characterization of silicon open stencil

✍ L.-M. Buchmann; U. Mescheder; M. Torkler 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 329 KB