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Ion-implant simulations: The effect of defect spatial correlation on damage accumulation

✍ Scribed by K.R.C. Mok; M. Jaraiz; I. Martin-Bragado; J.E. Rubio; P. Castrillo; R. Pinacho; M.P. Srinivasan; F. Benistant


Book ID
108215255
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
188 KB
Volume
124-125
Category
Article
ISSN
0921-5107

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