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Effect of the density of collision cascades on ion implantation damage in ZnO

✍ Scribed by Azarov, A. Yu.; Kucheyev, S. O.; Titov, A. I.; Karaseov, P. A.

Book ID
111691738
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
592 KB
Volume
102
Category
Article
ISSN
0021-8979

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Effect of collision cascade density on radiation damage in SiC
✍ A.Yu. Azarov; A.I. Titov; P.A. Karaseov; A. HallΓ©n πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 409 KB

The damage accumulation in 6H-SiC bombarded at room temperature with 1.3 keV/amu atomic P + ions and small cluster ions PF ΓΎ n (n = 2 and 4) have been studied by Rutherford backscattering spectrometry in channeling mode. Results show that collision cascade density strongly affects damage buildup in