✦ LIBER ✦

Ion flux nonuniformities in large-area high-frequency capacitive discharges

✍ Scribed by A. Perret; P. Chabert; J. Booth; J. Jolly; J. Guillon; P. Auvray

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Standing wave and skin effects in large-

✍ Lieberman, M A; Booth, J P; Chabert, P; Rax, J M; Turner, M M 📂 Article 📅 2002 🏛 Institute of Physics 🌐 English ⚖ 821 KB

Electromagnetic field nonuniformities in

✍ Sansonnens, L; Howling, A A; Hollenstein, Ch 📂 Article 📅 2006 🏛 Institute of Physics 🌐 English ⚖ 244 KB

Theoretical and experimental study of io

✍ Schweigert, I V; Ariskin, D A; Chernoiziumskaya, T V; Smirnov, A S 📂 Article 📅 2011 🏛 Institute of Physics 🌐 English ⚖ 529 KB

Separate control of the ion flux and ion

✍ Lafleur, T.; Delattre, P. A.; Johnson, E. V.; Booth, J. P. 📂 Article 📅 2012 🏛 American Institute of Physics 🌐 English ⚖ 565 KB