✦ LIBER ✦
Electromagnetic field nonuniformities in large area, high-frequency capacitive plasma reactors, including electrode asymmetry effects
✍ Scribed by Sansonnens, L; Howling, A A; Hollenstein, Ch
- Book ID
- 121497419
- Publisher
- Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 244 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0963-0252
No coin nor oath required. For personal study only.