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Standing wave and skin effects in large-area, high-frequency capacitive discharges

โœ Scribed by Lieberman, M A; Booth, J P; Chabert, P; Rax, J M; Turner, M M


Book ID
111871453
Publisher
Institute of Physics
Year
2002
Tongue
English
Weight
821 KB
Volume
11
Category
Article
ISSN
0963-0252

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