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Ion channeling analysis of MBE grown Si1−xGex/Si strained layer superlattices

✍ Scribed by N.R. Parikh; G.S. Sandhu; N. Yu; W.K. Chu; T.E. Jackman; J.-M. Baribeau; D.C. Houghton


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
509 KB
Volume
163
Category
Article
ISSN
0040-6090

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