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Influence of substrate orientation on the characteristics of Si1âxGex/Si strained layers grown by MBE

✍ Scribed by Etoh, H.; Murakami, E.; Ishizaka, A.; Shimada, T.; Miyao, M.

No coin nor oath required. For personal study only.

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Influence of substrate orientation on the characteristics of Si1âxGex/Si strained layers grown by MBE