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Molecular beam epitaxy of strained Si1−xGex layers on patterned substrates

✍ Scribed by E. Bugiel; B. Dietrich; H.J. Osten

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 581 KB
Volume: 130
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(93)90550-g

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