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Growth and characterization of Si/SiGe microstructures on patterned Si substrates using gas source molecular beam epitaxy

✍ Scribed by J. Zhang; X.M. Zhang; A. Matsumura; A. Marinopoulou; J. Hartung; N. Anwar; G. Parry; M.H. Xie; S.M. Mokler; J.M. Fernández; B.A. Joyce


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
405 KB
Volume
150
Category
Article
ISSN
0022-0248

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