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Ion channeling analysis of buried epitaxial Co silicides

✍ Scribed by K. Kohlhof; S. Mantl; B. Stritzker

Book ID: 112376630
Publisher: Springer
Year: 1989
Tongue: English
Weight: 303 KB
Volume: 333
Category: Article
ISSN: 1618-2650
DOI: 10.1007/bf00572380

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