✦ LIBER ✦

Ion beam system for the new high current ion implantation system Extrion-1000

✍ Scribed by Shu Satoh; Takao Sakase; Edward Evans; Reuel B. Liebert

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Dose control system for the Extrion 1000

✍ Reuel B. Liebert; Shu Satoh; Adrian Delforge; Edward Evans 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 449 KB

New method of solid state wafer cooling

✍ Eric Mears; Edward Evans; Keith Pierce; Reuel Liebert 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 284 KB

Advances in the Extrion 1000 and XP Seri

✍ M. Harris 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 783 KB

The Extrion 1000: A new high current ion

✍ Reuel B. Liebert; Adrian Delforge; Richard Hertel; Henry Lulsdorf; Eric Mears; S 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 437 KB

Control of metal contamination in the Va

✍ Reuel B. Liebert; Shu Satoh; Bjorn O. Pedersen; Daniel F. Downey; Takao Sakase; 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 521 KB

Control of ion beam current density and

✍ Masayasu Tanjyo; Shuichi Fujiwara; Hiromichi Sakamoto; Masao Naito 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 350 KB