✦ LIBER ✦

Advances in the Extrion 1000 and XP Series high-current ion implantation systems

✍ Scribed by M. Harris

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion beam system for the new high current

✍ Shu Satoh; Takao Sakase; Edward Evans; Reuel B. Liebert 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 454 KB

New method of solid state wafer cooling

✍ Eric Mears; Edward Evans; Keith Pierce; Reuel Liebert 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 284 KB

The Extrion 1000: A new high current ion

✍ Reuel B. Liebert; Adrian Delforge; Richard Hertel; Henry Lulsdorf; Eric Mears; S 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 437 KB

Control of metal contamination in the Va

✍ Reuel B. Liebert; Shu Satoh; Bjorn O. Pedersen; Daniel F. Downey; Takao Sakase; 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 521 KB

A system and performance overview of the

✍ Michael W. Pippins 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 457 KB

Change in the properties of BT-23 titani

✍ E. A. Bazyl’; A. D. Pogrebnyak; B. P. Gritsenko; S. V. Sokolov; V. V. Staiko; N. 📂 Article 📅 1999 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 110 KB