✦ LIBER ✦

Control of metal contamination in the Varian Extrion 1000 ion implantation system

✍ Scribed by Reuel B. Liebert; Shu Satoh; Bjorn O. Pedersen; Daniel F. Downey; Takao Sakase; Edward Evans

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Control of wafer charging on the Varian

✍ Shu Satoh; Bjorn O. Pedersen; Daniel F. Downey; Takao Sakase; Reuel B. Liebert; 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 456 KB

Dose control system for the Extrion 1000

✍ Reuel B. Liebert; Shu Satoh; Adrian Delforge; Edward Evans 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 449 KB

Energy contamination of P2+ ion beams on

✍ P.F.H.M. van der Meulen; S. Mehta; R.E. Kaim 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 438 KB

Advances in the Extrion 1000 and XP Seri

✍ M. Harris 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 783 KB

New method of solid state wafer cooling

✍ Eric Mears; Edward Evans; Keith Pierce; Reuel Liebert 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 284 KB

The Extrion 1000: A new high current ion

✍ Reuel B. Liebert; Adrian Delforge; Richard Hertel; Henry Lulsdorf; Eric Mears; S 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 437 KB