The Extrion 1000: A new high current ion implantation system for automated fabrication environments and intelligent process control

✍ Scribed by Reuel B. Liebert; Adrian Delforge; Richard Hertel; Henry Lulsdorf; Eric Mears; Shu Satoh

• Book ID: 113279708
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 437 KB
• Volume: 37-38
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(89)90240-1