✦ LIBER ✦

Control of ion beam current density and profile for high current ion implantation systems

✍ Scribed by Masayasu Tanjyo; Shuichi Fujiwara; Hiromichi Sakamoto; Masao Naito

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High current density, broad beam ion imp

✍ P.J Wilbur; R Wei; W.S Sampath 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 450 KB

A high-resolution beam profile measuring

✍ N. Fujishita; K. Noguchi; S. Sasaki; H. Yamamoto 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 320 KB

Writing implantation with a high current

✍ L. Bischoff; E. Hesse; D. Panknin; W. Skorupa; J. Teichert 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 348 KB

Focused ion beam system with high curren

✍ L. Bischoff; E. Hesse; D. Janssen; F.K. Naehring; F. Nötzold; G. Schmidt; J. Tei 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 261 KB

Ion beam system for the new high current

✍ Shu Satoh; Takao Sakase; Edward Evans; Reuel B. Liebert 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 454 KB

Control techniques for a high current io

✍ Erich H. Bayer; John I. Granlund; Lucien F. Paul 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 228 KB