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Focused ion beam system with high current density

✍ Scribed by L. Bischoff; E. Hesse; D. Janssen; F.K. Naehring; F. Nötzold; G. Schmidt; J. Teichert


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
261 KB
Volume
13
Category
Article
ISSN
0167-9317

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