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High resolution sputtering using a focused ion beam

✍ Scribed by R.L. Kubena; R.L. Seliger; E.H. Stevens

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 482 KB
Volume: 92
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(82)90199-7

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