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Ion beam synthesis and recrystallization of amorphous SiGe/SiC structures

✍ Scribed by A. Pérez-Rodríguez; A. Ramano-Rodríguez; C. Serre; L. Calvo-Barrio; R. Cabezas; J.R. Morante; J. Calderer; H. Reuther; W. Skorupa

Book ID
114168412
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
514 KB
Volume
120
Category
Article
ISSN
0168-583X

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## Three areas will be reviewed where the use of megaelectronvolt ion beams has contributed to the understanding of the properties of amorphous silicon: (1) thermodynamic and relaxation effects; (2) thermal and radiation-enhanced diffusion; (3) interracial segregation. trating on the segregation a