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Amorphization with ion irradiation and recrystallization by annealing of SiC crystals

✍ Scribed by J Aihara; K Hojou; S Furuno; M Ishihara; K Hayashi


Book ID
114172085
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
652 KB
Volume
166-167
Category
Article
ISSN
0168-583X

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Interaction of megaelectronvolt ion beam
✍ J.M. Poate πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 576 KB

## Three areas will be reviewed where the use of megaelectronvolt ion beams has contributed to the understanding of the properties of amorphous silicon: (1) thermodynamic and relaxation effects; (2) thermal and radiation-enhanced diffusion; (3) interracial segregation. trating on the segregation a