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Crystallization of ion-beam-synthesized SiC layer by thermal annealing

✍ Scribed by Wu, W.; Chen, D.H.; Cheung, W.Y.; Xu, J.B.; Wong, S.P.; Kwok, R.W.M.; Wilson, I.H.


Book ID
113035315
Publisher
Springer
Year
1998
Tongue
English
Weight
361 KB
Volume
66
Category
Article
ISSN
1432-0630

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