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Ion beam induced amorphization and recrystallization of Si/SiC/Si layer systems

✍ Scribed by K. Volz; J.K.N. Lindner; B. Stritzker

Book ID: 114168409
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 570 KB
Volume: 120
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(96)00495-8

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