Growth of amorphous SiC film on Si by means of ion beam induced mixing

✍ Scribed by Barna, Árpád; Gurban, Sandor; Kotis, László; Lábár, János; Sulyok, Attila; Tóth, Attila L.; Menyhárd, Miklós; Kovac, Janez; Panjan, Peter

• Book ID: 119192626
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 520 KB
• Volume: 263
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2012.09.063