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Formation of β-SiC films by ion beam mixing of SiC multilayers

✍ Scribed by J.P. Rivière; M. Zaytouni; M.F. Denanot; J. Allain


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
567 KB
Volume
29
Category
Article
ISSN
0921-5107

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