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Preparation of β-SiC films by r.f. sputtering

✍ Scribed by Shigehiro Nishino; Hiroyuki Matsunami; Masanori Odaka; Tetsuro Tanaka


Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
549 KB
Volume
40
Category
Article
ISSN
0040-6090

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