Chew and C u l l i s (1984; 1985) have r e p o r t e d s u c c e s s f u l i o c m i l l i n g of InP and InP devices u s i n g i o d i n e as t h e r e a c t i v e gas. The i o d i n e i o n s n o t only s p u t t e r atoms from t h e s u r f a c e , b u t a l s o chemically r e a c t w i t h t're
Ion beam milling of silica for IR transmission. (GB)
- Publisher
- Elsevier Science
- Year
- 1977
- Tongue
- English
- Weight
- 149 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.
โฆ Synopsis
The pressure i n the coun1cr was varied bctuccn 76760 1orr during espcrimcnts.
The role of secondary processes i n the operation of gas counlcrs is discussed.
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