✦ LIBER ✦
A study on fabrication of silicon mold for polymer hot-embossing using focused ion beam milling
✍ Scribed by Sung-Won Youn; Chieko Okuyama; Masaharu Takahashi; Ryutaro Maeda
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 1008 KB
- Volume
- 201
- Category
- Article
- ISSN
- 0924-0136
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