Ion milling of InP specimens with Ar/O2 for transmission electron microscopy

✍ Scribed by Ivey, D. G. ;Piercy, G. R.

• Publisher: Wiley (John Wiley & Sons)
• Year: 1987
• Tongue: English
• Weight: 149 KB
• Volume: 5
• Category: Article
• ISSN: 0741-0581
• DOI: 10.1002/jemt.1060050112

✦ Synopsis

Chew and C u l l i s (1984; 1985)

have r e p o r t e d s u c c e s s f u l i o c m i l l i n g of InP and InP devices u s i n g i o d i n e as t h e r e a c t i v e gas. The i o d i n e i o n s n o t only s p u t t e r atoms from t h e s u r f a c e , b u t a l s o chemically r e a c t w i t h t're excess indium t o form a v o l a t i l e h a l i d e .