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Ion beam lithography using single ions

✍ Scribed by A. Alves; P. Reichart; R. Siegele; P.N. Johnston; D.N. Jamieson

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 270 KB
Volume: 249
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.03.128

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