✦ LIBER ✦

Ion beam figuring for lithography optics

✍ Scribed by Martin Weiser

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion beam lithography

✍ Kenji Gamo; Susumu Namba 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 922 KB

Beam optics design for ion implantation

✍ J.H. Keller 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 555 KB

Masked ion beam lithography for proximit

✍ E. Hammel; H. Löschner; G. Stengl; H. Buschbeck; A. Chalupka; H. Vonach; E. Ceka 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 401 KB

Comparison of Optical, X-ray, Electron a

✍ Shinji Okazaki 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 835 KB

Ion beam lithography using single ions

✍ A. Alves; P. Reichart; R. Siegele; P.N. Johnston; D.N. Jamieson 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 270 KB

Wide beam ion optics of mass analyser fo

✍ G K Muralidhar; S Mohan; A G Menon; B Krishnarajulu 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 282 KB