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Ion beam induced defects in crystalline silicon

✍ Scribed by F Cristiano; N Cherkashin; X Hebras; P Calvo; Y Lamrani; E Scheid; B de Mauduit; B Colombeau; W Lerch; S Paul; A Claverie

Book ID: 113822666
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 605 KB
Volume: 216
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2003.11.019

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