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Proximity gettering of Au to ion beam induced defects in silicon

✍ Scribed by J. Wong-Leung; J.S. Williams; R.G. Elliman; E. Nygren; D.J. Eaglesham; D.C. Jacobson; J.M. Poate

Book ID: 113284923
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 581 KB
Volume: 96
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)00494-3

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